Seksyen 8486

-

100

u 0 0 0 0 0 0 0 0 0 0 0 200

u 0 0 0 0 0 0 0 0 0 0 0 300

u 0 0 0 0 0 0 0 0 0 0 0 400

u 0 0 0 0 0 0 0 0 0 0 0 500

u 0 0 0 0 0 0 0 0 0 0 0 900

u 0 0 0 0 0 0 0 0 0 0 0

Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories.

Machines and apparatus for the manufacture of boules or wafer:

Spin dryers for semiconductor wafer processing

Machines and apparatus for sawing monocrystal semiconductor boules into slices, or wafers into chips

Grinding, polishing or lapping machine for processing semiconductor wafers

Other

Machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers

Apparatus for rapid heating of semiconductor wafers 112